Optical 3D Surface Measurement System

Users achieve traceable measurement results in a high repeatability and a vertical resolution of up to 10nm. The robust measurement principle of Focus Variation in combination with a vibration-isolating hardware allows the form and roughness measurement of also large and heavy components. All axes of InfiniteFocus are fitted with highly accurate encoders ensuring precise stage movement. With an automation interface, InfiniteFocus is also applied for fully automatic measurement in production.