Nanofluor® Elastomers for Semiconductor Industry
Nanofluor® Elastomers for Semiconductor IndustryNanofluor®�elastomers can be considered as hybrid materials, bridging a gap between the low cost of fluoroelastomer (FKM) and high cost of perfluoroelastomer (FFKM) polymer types. This material combines ultra-purity with excellent plasma resistance.
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